IBM has created a 350GHz silicon transistor, and says it could hit the commercial market at speeds of 150 Ghz in two years.
IBM Source
Intel is working on Extreme Ultraviolet (EUV) lithography.
IBM Source
Intel is working on Extreme Ultraviolet (EUV) lithography.
Intel SourceAble to keep pace with Moore's Law, EUV lithography can potentially produce processors with speeds in excess of 10 GHz and memory chips with storage capacities that greatly exceed those of today.